INDUSTRY NEWS

ORDER DESK

Slurry tools go to Maine

National Semiconductor has purchased slurry blending and distribution systems from MEGA Systems & Chemicals for installation at the chipmaker's plant in South Portland, ME. The order includes two MEGAflow IIIC high-flow systems, which supply slurry to a medium line of polishers using a global distribution loop. National processes 8-in. wafers for chips with 0.35-µm geometries at the South Portland fab. The chipmaker will shift to 0.25-µm process technologies by the middle of 1998, according to MEGA.

TI buys SEMs

Texas Instruments has purchased several critical dimension and defect inspection systems from KLA-Tencor for use in TI's Jack Kilby Center. The research facility is located in Dallas. TI's order includes 8100XP CD-SEM tools and an automated SEMSpec 2702 wafer inspection system. The SEMSpec tool will be used initially for developing advanced process technology and employed later to facilitate the transfer of technology to other TI fabs. The chipmaker will use the CD-SEM systems for qualifying deep-UV steppers and for advanced process control. KLA-Tencor says the 8100 XP features an "electron optical" design that allows bottom imaging of high-aspect-ratio structures, while the SEMSpec system detects material and electrical defects without resorting to time-consuming electrical probe test methods.

Novellus picks Asyst's minis

Novellus Systems will integrate SMIF wafer-isolation equipment from Asyst Technologies into its Concept Two platform for thin-film process equipment. Asyst's load port interface, called SMIF-LPI, will be used in all Novellus Sequel, Prism, Altus, and Speed systems. With the Novellus designs, there will be 200 process tools that incorporate Asyst's SMIF technology, the vendor says. The process tool manufacturer selected the SMIF system primarily because it did not increase the size of the Novellus tools, according to Asyst.

MicroHome | Search | Current Issue | MicroArchives
Buyers Guide | Media Kit