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Linear buys Varian implanters

Linear Technology has purchased two ion implanters from Varian Associates. The VIISion 200 high-current ion implanters will be shipped in June 1999 and installed at Linear's 6-in. wafer fab in Milpitas, CA. Linear makes logic devices for use in a line of products that includes amplifiers, voltage regulators, and pulse-width modulators. Palo Alto, CA—based Varian says it showcased the equipment's matrix of implant capabilities for Linear in March 1998 at its Class 10 demonstration and process development laboratory in Gloucester, MA.

Winbond seeks memory repair

Electro Scientific Industries of Portland, OR, has received a multiple order for its ESI Model 9300 memory yield improvement system from Winbond Electronics of Taiwan. The systems will be installed at Winbond's test line four in Hsin-Chu, Taiwan, for improving yields on the foundry's 64-Mb DRAM manufacturing line.

CNET cleaves to SELA tool

France Telecom's R&D unit has installed its second microcleaving system from SELA. Le Centre National d'Étude des Télécommunications (CNET) set up the SELA MC200 at its laboratory in Grenoble. Designed for process monitoring and analysis, the MC200 produces cross sections for examination using a high-resolution Hitachi 5000 SEM. The microcleaving tool produces no artifacts that could prevent an accurate sample analysis, the vendor says. Technologists at CNET's lab analyze an average of 30 wafers per month, according to SELA.

Philips buys FSI clusters

Philips Research has purchased two Polaris 2500 microlithography cluster tools from FSI International. Philips will install the systems in its research laboratories in Eindhoven, the Netherlands. The tools are scheduled for delivery in the second half of FY99. They will be used for i-line and DUV processing for devices with linewidths 0.18 µm. FSI also announced that Honeywell has ordered the Polaris cluster tool for installation in the company's newly renovated fab in Plymouth, MN. Honeywell manufactures radiation-hardened products for use in satellites.

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