Surface Profiler

Veeco Metrology Group

Santa Barbara, CA

Equipped with a front-opening unified pod, the V 300-SL surface profiler enables users to monitor process wafers in a fully automated environment. Stylus-based measurement technology provides step height repeatability for monitoring the uniformity of etch and deposition processes. The profiler's modular design combines cleanroom engineering, robotic handling, and SECS/GEM communications. A linear encoded sample stage has a resolution of 0.25 µm and a pattern recognition system for automatic alignment, positioning repeatability, and high throughput. The SoftScan low-inertia sensor enables low-force, low-noise scanning for the nondestructive measurement of processed wafers. Additional features include a vibration isolation platform and noise dampening. Surface-imaging software displays wafer topography in three dimensions for surface area analysis. (Semicon Europa, Booth B1.524)

Instrumented Wafers

SensArray

Santa Clara, CA

Available in diameters from 100 to 300 mm, Process Probe 1630 instrumented wafers provide multipoint wafer temperature measurement of atmospheric CVD process in situ in real time. They are used to characterize processes, calibrate temperature set points, and evaluate temperature variations along moving belts. They can have up to 16 embedded thermocouples to map the temperature across a wafer, and the sensors can be embedded in bare, coated, or patterned substrates to match the thermal properties of test or product wafers. The instrumented wafers monitor temperatures from 0° to 800°C accurate to ±1.1°C or ±0.4% of reading and have <±0.1°C sensor-to-sensor precision. (Semicon Europa, Booth A1.210AC)

Photomask Metrology System

Leica

Wetzlar, Germany/Deerfield, IL

The LWM 250 measures photomask linewidths using 365-nm UV light in transmitted light mode. It can also use white light in either transmitted or reflected mode. An i-line measurement capability in transmitted light mode enhances resolution for features >=0.3 µm. The UV feature enables measurement times using white light and a proprietary laser autofocus system of <1 second per feature. Windows-based software permits on- or off-line programming for automatic measurements. The system also offers video-based image processing capability. (Semicon Europa, Booth B1.224)

Manifold System

Furon

Anaheim, CA

The MultiFlow manifold system houses 2 to 20 or more valves in a single package with a small footprint. The system's flow ranges from 0.5 to 2.7 Cv, making it suitable for CMP and slurry-mixing applications. The system accommodates temperatures of 0° to 82°C and has a flow factor of 2.7 Cv through the normally closed ports. It operates at up to 90 psig forward and full back pressure. All its wetted parts are made of high-purity PTFE and PFA. A single common inlet minimizes leaks. A variety of connector sizes, flow capacities, and valve functions are contained in a single unit. Options include manual actuation, trickle flow, and normally open and three-way port configurations. The system is assembled, tested, and packaged in a cleanroom. (Semicon Europa, Booth A1.442)

Ionizing Air Gun

Simco

Hatfield, PA

The Top Gun Sidekick ionizing air gun has a filter at the exhaust, 18 in. of flexible hose, integrated foot pedal, and mounting brackets. The foot pedal controls the ionization and airflow and allows operators to use their hands during manufacturing. The pedal control also prolongs the life of the ionizer and reduces the cost of compressed air, because ionization and airflow operate only when the pedal is depressed. The flexible neck lets the user focus the gun's ionizing airflow. The gun uses electrical corona discharge and has a static discharge time of 1.3 seconds @ 30 psi and 6 in. from the gun's tip. In addition to compressed air, it uses nitrogen or any other inert gas. (Semicon Europa, Booth B1.378)

Mass-Flow Meters

Bronkhorst Hi-Tec

Ruurlo, The Netherlands

The L30 Liqui-Flow thermal MFC has a maximum measuring/control range of 0.4 to 20 kg/hr at pressures from vacuum to 100 bar. The instrument envelops a 316L stainless-steel tube with a thin-film thermopile heater-sensor attached to the outside of the tube. The liquid heated inside the sensor is only a few degrees higher than its incoming temperature to minimize decomposition or outgassing. The instrument is insensitive to its mounting position. The MFC can be sterilized and contains no moving parts or elastomer seals. Its low pressure drop is comparable with Coriolis-type instruments. The controller's integrated control function can be connected to a Combi-Flow control valve to form a control loop as an alternative to a metering pump. An output signal indicates flow, which is steady, not pulsating. (Semicon Europa, Booth B1.105)

Low-K Polymers

AlliedSignal Advanced
Microelectronic Materials

Sunnyvale, CA

Suitable for manufacturing semiconductors with 0.18-µm geometries, Accuspin T-23 low organic siloxane polymers exhibit >90% planarization for a 0.4-µm-thick film on features 1 µm high. The materials retain low-k dielectric values and ensure thermal stability without poisoning via holes in nonetchback processes. The polymers maintain low dielectric properties at temperatures up to 450°C. (Semicon Europa, Booth B1.422)

CMP Process Controller

Nova Measuring Systems

Rehovoth, Israel

NovaScan closed-loop control for dielectric CMP processes is installed directly on the polisher to measure each wafer after polishing. Using classical control theory, the option is designed to minimize the time and materials needed for process calibration. Additional benefits include simple algorithm correction based on the actual process and a range of operator controls. Each wafer is measured for statistical and process control. Unique algorithms calculate first-wafer polish time, and an audiovisual alarm ensures safe unattended operation. (Semicon Europa, Booth B2.509)

Yield Analysis Software

Electroglas

Santa Clara, CA

LogicMap software allows fab engineers to automatically translate the binsort functional test data of logic devices into x-y coordinates for yield and failure analysis. The program overlays failure information at the signal level with fab information. It can be used with simulators such as FastScan to translate test data from logic devices. The simulator takes the test data input from logic chips and sends a list of suspected failure addresses. The program then takes these suspect nodes from the simulator and uses the list to identify the exact coordinates of the failing nodes. Traces of the failing nodes can be crossmapped to the design layout over multiple photomask layers using special software. Options include wafer maps with defect overlays, trend charts, and histograms. Kill-ratio charts enable users to determine which problems are defect related instead of device related. (Semicon Europa, Booth A2.602)

Vinyl Gloves

Oak Technical

Stow, OH

Series 27 powder-free vinyl gloves are 12 in. long to completely cover the hand, wrist, and forearm to minimize contamination. The Class 1—compatible gloves come in a 100-glove, vacuum-sealed polyethylene bag. The gloves come 1000 per case and are available in four sizes. Fingertips are a minimum of 0.002 in. thick. Extra-large gloves come 50 per bag and 500 per case. (Semicon Europa, Booth A1.142)

Noncontact Measurement Station

SigmaTech

Phoenix, AZ

Accurate to the submicron level, the (sum)9600A2 uses noncontact autopositioning back-pressure probe technology to measure thicknesses up to 10,000 µm as well as bow and warp up to 2000 µm. The instrument accurately measures any type of fragile, brittle, or polished material, including thick or extra thin wafers measuring up to 300 mm. Applications include CMP monitoring, square wafer mapping, and thickness measurement of nonconductive material. (Semicon Europa, Booth A1.344N)

Microcleaving System

SELA

Yokneam Elite, Israel/Santa Clara, CA

Performing integral die and wafer cross-sectioning in just 15 minutes for SEM analysis, the MC500 microcleaving system combines automation and high target accuracy. For failure analysis it also offers significant improvements in FIB and TEM utilization. Increasing process yield and effectiveness by reducing overall analysis cycle time, the system cleaves small structures, using the substrate's natural crystal planes to cleave samples with a minimum initial size of only 4.2 * 2.1 mm. A built-in liquid nitrogen function improves the quality of cross-sections for application-specific layer types, such as copper. The tool is designed to decrease the risk of damaging or losing targets, and it also enables target cleaving near the wafer edge. (Semicon Europa, Booth A1.210AB)

Product Extra!

KLA-Tencor says it is the first semiconductor equipment company to reach Level 2 in the five-level Capability Maturity Model for Software (SW-CMM) established by the Software Engineering Institute (SEI). Level 2 has been reached by the reticle and photomask inspection division, helping the unit deliver high-quality software on schedule at a low cost. The SW-CMM, according to the institute, has become the standard in the software community for assessing and improving software processes, allowing SEI to establish an effective means for modeling, defining, and measuring the standards attained by software professionals. Information: 408/875-7037. (Semicon Europa, Booth B1.544)

With germanium tetrafluoride now available, Matheson Electronic Products Group is marketing all five ion implantation gases as safe delivery source (SDS) products. Using dopant gases at subatmospheric pressure, SDS delivers gas based on the pressure differential between the cylinder and the implanter's ion source region. The company says the source product lines provide enhanced plant safety, increased uptime, consistent product quality, and higher implanter availability. Information: 408/971-6500.

Providing easy access to its product lines with links to accessories and related products, MKS has established an on-line vacuum store that provides extensive product data and on-line ordering. In addition to a complete library of technical data, the Web site offers downloadable CAD drawings to speed system designs. Customers can also request quotes and receive responses from company engineers immediately. The Internet address is http://www.mksinst.com. (Semicon Europa, Booth B2.444)

Three hundred vacuum parts and supplies can be ordered on-line from Varian. The Web site, containing items in the "Hardware Express" catalog, offers a complete selection of replacement vacuum flanges, fittings, and accessories, which are kept in stock for 24-hour shipment. The address of the Internet site is http://www.sales.varian.com. Information: http://www.varian.com. (Semicon Europa, Booth B1.322)

Granville-Phillips's CE-marked version of its digital display Mini-Convectron vacuum gauge has an easy-to-read three-digit display and adjustable set points and signals for remote indication and process control. It offers pressure indication at the gauge connection point and responds quickly to pressure changes. Information: 303/443-7660. (Semicon Europa, Booth B1.542B)

Voltaix has introduced a toll-free number providing direct access to its sales department. The new number, 800/865-8249, is for North American customers interested in the company's specialty gases, which the company manufactures and supplies to the semiconductor and photovoltaics industries. These gases are used in a wide range of applications, including CVD, plasma-enhanced CVD, and ion implantation. Information: tpletzke@voltaix.com. (Semicon Europa, Booth B2.105)

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