INDUSTRY NEWS

ORDER DESK

Many Lam etch tools sold

Several chipmakers from around the world have placed orders for the TCP 9600PTX metal etch system from Lam Research, the supplier announced. Orders for the high-density tool have come from foundries in Taiwan and Singapore, DRAM manufacturers in South Korea and Japan, and logic device manufacturers in Europe and the United States. The system processes 45 wafers per hour and has a low consumables rate, Lam says.

Hyundai buys ASML scanners

Hyundai Semiconductor America will install several PAS 5500/550B step-and-scan systems from ASM Lithography at its fab in Eugene, OR. Installation of the tools was set to start in March. The chipmaker will use the deep-UV tool for manufacturing 64-, 128-, and 256-Mb DRAMs. Hyundai America's parent firm is already using the stepper to make DRAMs at several fabs in Ichon, South Korea. The new order marks the first installation for the U.S. plant. ASML also announced that Samsung has placed an order for several scanners for installation at fabs in South Korea.

Order backs copper process

A U.S. manufacturer of microprocessors has bought slurry-blending systems from FSI International for use with copper CMP processes at the manufacturer's European plant, the supplier reports. The $2.3-million order for the P4400 systems is the third shipment of slurry-blending equipment to the chipmaker, FSI says. The tools blend and distribute oxide, tungsten, copper, or polysilicon CMP slurry. The Minnesota-based supplier also sold two Polaris microlithography cluster tools to Shipley for installation at its fabs 2 and 3, R&D facilities in Marlborough, MA. Shipping in the second half of FY99, the tools will be used for research into DUV and i-line processes. The supplier also sold two dual-chamber Aries CryoKinetic cleaning systems to an unnamed U.S. customer.

Resist removal tool bought

AlliedSignal Electronic Materials has purchased a single-wafer photoresist removal system from GaSonics International. Allied will install the system at its facility in Sunnyvale, CA, where it will be used to develop low-k materials. GaSonics has been working with AlliedSignal since 1995 to provide support for research into spin-on dielectric materials, says the San Jose—based vendor. Allied will characterize the reactions of different low-k materials in plasma photoresist removal applications. The materials include Flare, HOSP, and Nanoglass.

AMD buys Varian implanter

AMD bought a VIISta 80 serial process high-current ion implanter from Varian Associates. The chipmaker will use the system at its submicron development center in Sunnyvale, CA, to develop advanced implantation processes for manufacturing both logic and flash memory ICs. Varian says it has worked with AMD to develop ultrashallow junctions and related implant processes. The VIISta 80 is the product of the collaborative work, which has resulted in implanting and annealing processes at the 0.25-µm point and below, according to Varian.

Tool set for MEMS work

The University of Illinois, Urbana campus, plans to develop advanced microelectromechanical systems (MEMS) devices using a newly acquired Shuttlelock 770 plasma processing system from Plasma-Therm. Researchers are developing the MEMS devices for biomedical and optoelectronics uses. The tool incorporates PlasmaTherm's own deep reactive ion etch ICP process technology and deep silicon etch technology licensed from Robert Bosch.

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