Wafer Carrier

Fluoroware

Chaska, MN

The KA250 wafer carrier is molded of PEEK and a polycarbonate to ensure low-particulate operation and dimensional stability. The carrier's wafer and equipment contacts are made of Stat-Pro 3000, a static-dissipative PEEK material, while a polycarbonate is used in the frame and end wall. The design also ensures reliable equipment interface and robotic wafer transfer. StableWafer pocket design technology controls the wafer plane even when the wafer is removed from its pocket up to 21/2 in. from the fully seated position. This feature eliminates wafer chatter and flutter. Carriers can be colored red, blue, or green to differentiate wafer lots. End walls may also be a different color from the carrier's frame in order to extend color coding options. Additional identifying markers such as RF tags or adhesive bar code labels are also available.

CD-SEM

Applied Materials

Santa Clara, CA

Designed for sub-0.15-µm metrology, the VeraSEM accommodates both 200- and 300-mm wafers and can be upgraded to measure critical dimensions on sub-0.13-µm geometries. The system's process variation monitoring technology uses a column design and special algorithms to measure line edge roughness, line edge width variation, and open or closed contact holes. A high-speed stage, fast wafer handling, and accurate measurement algorithms ensure high throughput.

Vacuum Robot

Genmark Automation

Sunnyvale, CA

The Gencobot 9 servo-controlled robot offers repeatable indexing and transfer of wafers and flat-panel displays in vacuum processes >=10—8 torr. The robot's global positioning system ensures accurate transfer of 300-mm wafers. An optional yaw-axis feature eliminates the need for radial placement of process stations or cassettes around the robot. A variety of arm options permits the robot to transport an array of wafers, FPDs, and photomasks up to 32 in. Vertical stroke options of 3 and 6 in. eliminate the need for a separate vacuum indexer or elevator assembly. The robot's six degrees of freedom compensate for misaligned cassettes and deflected arms during transport.

Hazardous Gas Monitor

Control Instruments

Fairfield, NJ

The SmartMaxII is a hazardous gas monitor that handles readings from as many as four different sensors. Suitable for use in Division I hazardous areas, the monitor senses for combustible and toxic materials, substances in parts per million, and oxygen. An alarm, display, on-board relays, and an RS-485 serial port are standard features. The instrument can be used for one- or two-point projects or for monitoring an entire site.

Conveyor System

Quickdraw Conveyor Systems

Burnsville, MN

Housed in Class 1 enclosures, a modular conveyor system uses programmable rotators to transfer components in semiconductor and disk-drive OEM production processes. The system consists of 4-ft sections divided into buffered zones slightly longer than the length of the components. The components accumulate along one lane of the conveyor and are sent by the shuttle to the return lane for transport to outfeed conveyors. The buffered zones have their own drives and sensors to smoothly move pieces from one zone to the next. The system's zone control feature can be customized to suit process needs. Operating noise level is <65 dB.

Slurry-Dispensing Valve

LiQuality

Phoenix, AZ

Designed for precision dispensing of CMP slurries, a throttling valve incorporates a stepper motor to drive a one-piece diaphragm and poppet. The design promotes fast operation and smooth slurry flow. All wetted parts are made of 100% virgin PTFE. The valve can be combined with an electronic flow-meter, and electronic controls are housed separately on a single circuit board. Orifice size, process connections, and mounting type can be customized. Power consumption is 11 W, and the valve operates at 100 psi in a maximum temperature of 104°F.

Heated Valve

MKS Instruments,
Vacuum Products Group

Boulder, CO

The two-stage Jalapeño vacuum valve reaches a minimum internal temperature of 150°C. Suitable for use in low-pressure CVD processes, the heated valve prevents materials by-products from condensing. The system comprises a small pneumatic bypass valve and a main isolation valve. The bypass valve creates a small opening for the initial system pumpdown, slowing system evacuation. The main valve opens in the second stage, permitting full pumping speed. An optional thumbscrew or micrometer head for the bypass valve enables users to adjust flow. The two-stage valve comes in angle and in-line models with seal, limit switch, and solenoid options. Cleanroom-compatible jackets are made of materials that heat the component on the inside while the outside of the jacket remains warm. All heaters have a thermal fuse.

Disk Media Cleaner

SpeedFam International

Chandler, AZ

The modular Neptune system cleans thin-film memory-disk media using laminar process technology. The system's high liquid recirculation rate reduces tank recovery times and offers process cleanliness levels higher than conventional overflow weir tanks. The recirculation rate also reduces the use of surfactant, chemicals, and DI water and increases disk-rinsing capability by more than 450% over weir-style tanks. The tool's design enables process environments of Class 10 or better. Options include immersion disk scrubbing, heated ultrasonic cleaning, megasonic cleaning, and process monitoring.

Mass-Production Laser

Lambda Physik

Ft. Lauderdale, FL

Designed for fiber Bragg grating (FBG) fabrication in the production environment, the FBG excimer laser delivers 150 mJ per pulse at a repetition rate of 100 Hz when operated at 248 nm. Fiber Bragg gratings expand the functionality of optical fibers in telecommunications and sensing applications. The laser's single-dimension unstable resonator results in a spatial coherence of 1.5 mm, beam homogeneity, and long-term stability. The FBG-LN line-narrowed version, offering a temporal coherence length exceeding 1 cm, is designed for the interferometric writing of FBGs and holography.

Skin Lotion

Andersen Laboratories

Norwich, NY

Alicare lotion compensates for the low relative humidity, strong soaps, and glove use common to working in cleanroom environments. The highly concentrated lotion promotes both moisture retention and healing. It can be used on hands, elbows, face, knees, and legs to soothe dry, irritated skin. The lotion is static, nongreasy, and hypoallergenic.

Cleanroom Robots

Motoman

West Carrollton,OH

The SK6CR six-axis robot has a 13.2-lb payload capacity, a 52.2-in. reach, and repeatability of ±0.004 in. A short-arm model has the same specifications with a 35.7-in. reach. The Class 1 robots are suitable for handling disk-drive media, FPDs, and wafers measuring up to 12 in. The robots can be integrated with machine vision or laser-based sensing packages for mapping wafers. They can also be used with peripheral components such as grippers, software, workstations, and conveyor systems.

Pump Air Distributor

Wilden Pump & Engineering

Grand Terrace, CA

The Wil-Flo air distribution system eliminates freezing and increases the flow rates in the supplier's 11/2- , 2- , and 3-in. pumps. Used with the 2-in. pumps, the distribution system provides a flow rate of 206 gal/min. The system integrates a pressure relief valve for consistent shift signals and piston rings for maximum pressure differential. Sliding check assemblies direct the air exhaust to atmosphere, while exhaust ports eliminate freezing.

High-Purity Connectors

EM-Technik

Maxdorf, Germany

Series 1 D cleanroom connectors feature industry-standard threads for wide adaptability. They are made from a tube that has been widened to fit snugly into the sleeve of the fitting. Fastened to the fitting with a nut, the tube has an inside diameter that remains constant and unobstructed. Ultrapurity is maintained through a multi-step system of cleaning, assembling, and packing. Connectors are ultrasonically cleaned, rinsed, dried, assembled, tested, and packed in two heat-sealed bags. To prevent the penetration of particles, the inner bag is filled with nitrogen. The connectors come in PVDF, PFA, or natural PP to ensure high resistance and ease of handling.

Ultraclean Ionizer

Ion Systems

Berkeley, CA

Suitable for Class 1 use, the 5290eu Gas Jet AeroBar incorporates single-crystal silicon emitter points and a preflush of DI water. Requiring minimal maintenance, the ionizer maintains a sheath of clean, dry air or nitrogen around its emitter points, which cuts maintenance requirements by preventing particles from being attracted to the points. This reduces the necessity of cleaning the emitter points from once every 3 months to once every 6 to 12 months. Designed for semiconductor and FPD manufacturing, the ionizer can be used in any minienvironment.

Ergonomic Motorized Stage

Prior Scientific

Rockland, MA

The ErgoScan motorized stage system for traditional microscopy increases productivity and reduces operator fatigue. By controlling all stage movements and focus mechanisms with a low-resistance proportional joystick and a simple hand roller, this system improves the ergonomics of any new or existing microscope by eliminating the need to stretch for focus knobs and to manually turn stage controls. The stage has a travel range of 3 x 13/4 in. and accommodates 1 x 3-in. slides. The system includes a controller with a two-axis joystick, a motorized stage, a control box with an integral roller control, a focus drive, an adapter, and a power supply.

Product Extra!

Digital Instruments has introduced a small-footprint, integrated acoustic/vibration isolation system for its Dimension 3100 atomic force microscope. The IS3K system provides high-performance isolation from both airborne acoustics and floor vibration, allowing the Dimension 3100 to perform at optimum resolution and noise levels. Incorporating compact vibration isolation technology into the acoustic enclosure, the isolation system has an ergonomic design with keyboard support and twin flat-panel displays. Electronics and computer hardware are mounted below the microscope and acoustic enclosure. Measuring 301/2 x 42 in., the AFM is suitable for production environments with space limita-tions. Information: 805/967-1400.

John Goldman Associates' P-5K process management software for Applied Materials' P5X family of CVD systems monitors and records up to 50 deposition variables such as lamp power, RF power, pressure, temperature, and gas flow at 2-second intervals. Data are automatically collected around the clock, providing a continuous record of process parameters and events and giving users access to a complete data history to locate problems more easily. The software can help improve processes and set limits to keep processes in spec. Information: 714/283-5889.

ATMI's new NovaSource business has introduced subatmospheric gas delivery systems for high-density plasma (HDP) CVD processes. In qualifying tests NovaSource's subatmospheric phosphine source enabled the rapid integration of HDP-CVD phosphosilicate glass film. The supplier says the film is useful as a premetal dielectric for processing devices with linewidths 0.25 µm. An alternative to compressed-gas delivery systems, the system delivers large volumes of PH^₃ gas with enhanced safety, ATMI says. Information: 203/794-1100.

The 545 Floor Machine vacuum from Nilfisk passed a particle profile test, making it suitable for use in cleanrooms down to Class 100. The machine combines a high-filtration vacuum cleaner and a floor buffer for cleaning floor surfaces without contaminating them. Its four-stage filtration system features a two-ply disposable bag that fits in a dust container. The container is mounted on the handle to facilitate disposal. Two rubber hoses link the container to the motor and an adjustable suction skirt. A lockable safety latch eliminates the chance of inadvertent hose disassembly. Further filtration is achieved by means of a polyester main filter, a felt microfilter, and a HEPA exhaust filter. The HEPA filter collects 99.97% of all ultrafine particles >=0.3 µm. Information: 800/NIL-FISK.

MicroUnity will include simulation software from Sigma-C in its new WaveMaster microlithography software. The Solid-C program will be embedded in the WaveMaster software, which is designed to improve the precision of subwavelength lithography design. Part of the MaskTools line, the product is targeted at photolithography engineering desktop computers using Windows. Information: 408/734-8100.

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