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MICRO Buyers Guide Index

BOC Edwards

301 Ballardvale St.
Wilmington, MA 01887
Tel: 800/848-9800
Fax: 978/658-7969

Web: http://www.bocedwards.com
E-mail: info@bocedwards.com



(click to enlarge)

BOC Edwards is a leading supplier of integrated solutions for the manufacture of microelectronics devices, including silicon semiconductors, compound semiconductors and flat panel displays. Partnering with fabs, foundries and process tool manufacturers, BOC Edwards provides materials and process-enabling subsystems that are supported by best-in-class operations and maintenance services.

Process Cylinder Gases.

Offering a single source of technological expertise, innovative products and first class services, BOC Edwards maximizes value for both semiconductor device and process tool manufacturers. Our products include vacuum pumps, high purity bulk and cylinder process gases, gas delivery systems, exhaust management systems, chillers, monitoring instrumentation, chemical and slurry delivery systems and wastewater management systems. Our service offerings include design and project management, component cleaning and surface enhancement services as well as on-site and consultancy services. Benefits of our total systems approach include reduced lead times, optimized equipment efficiency, lower capital and install costs as well as cost of ownership - resulting in increased productivity and yield.

On-Site Fluorine Generation.


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