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Philtech

Shuwa Kioicho TBR Bldg. 401, 5-7 Kojimachi, Chiyoda-ku
Tokyo, 102-0083 Japan
Tel: +81 3 35120889
Fax: +81 3 35120884

E-mail: mura@philtech.co.jp

Description:
Philtech supplies test wafers up to 300 mm in size and various patterns down to 20 nm by using x-ray or E-beam lithography for small features and KrF or ArF lithography for usual features. The x-ray technique is used for on-chip inductors for 100-GHz RF ICs. The company provides 300-mm charge-up monitor TEG wafers.

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