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Ulvac Technologies

401 Griffin Brook Park Dr.
Methuen, MA 01844
Tel: 978/686-7550
Fax: 978/689-6301


ULVAC Technologies manufactures an extensive line of small and midsized rotary-vane and dry-vacuum pumps. Direct-drive, oil-sealed rotary-vane pumps and miniature dc-drive vacuum pumps are available, along with dry-vacuum pumps in diaphragm, rocking-piston, and rotary-vane styles. Ancillary products include a line of digital vacuum gauges as well as compact, portable Heliot helium mass spectrometer leak detectors, which combine rapid start-up and high sensitivity with long-term reliability and economy.

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