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FEI

7451 N.W. Evergreen Pky.
Hillsboro, OR 97124
Tel: 503/640-7500
Fax: 503/844-2615

E-mail: sales@feico.com

Description:
Structural Process Management from FEI goes below the surface to reveal details about device structures and manufacturing processes. Cross-sections of new materials, including copper and low-k dielectrics, and root-cause analysis for subsurface particle and voltage contrast defects are performed. The company provides products that perform control processes in the fab with automated 3-D metrology and defect analysis for geometries to 0.13 µm and beyond.

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