MICRO Buyers Guide Index
Matec Applied Sciences
56 Hudson St.
Northborough, MA 01532
Matec Applied Sciences manufactures unique, patented instruments for CMP slurry characterization. Semiconductor-related companies find the instruments highly suitable for the analysis of CMP slurries. MAS's CHDF-2000 is a high-resolution particle sizer that measures the true particle size distribution (PSD) of CMP slurries. The APS-100 measures PSDs and more, without the need for slurry dilution. The ESA-9800 measures slurry stability by Zeta-potential measurements without slurry dilution.
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