MICRO Buyers Guide Index
Rohm and Haas, Advanced Materials
185 New Boston St.
Woburn, MA 01801
Tel: 781/933-9243, 800/552-2283
Rohm and Haas, Advanced Materials is a manufacturer of solid CVD silicon carbide, a high-temperature ceramic material for wafer-handling and chamber components. This high-purity material has low plasma erosion and low particle generation, is cleanable in hot HCl and HF, and is available with low resistivity. It can be fabricated in a range of shapes and sizes, including for 300-mm wafers.
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