MICRO Buyers Guide Index
Solid State Measurements
110 Technology Dr.
Pittsburgh, PA 15275
SSM products measure electrical properties of semiconductor devices during fabrication. FastGate electrical metrology systems measure gate oxide thickness, flat band voltage, and leakage current on sub-1-nm oxides in-line on 200- and 300-mm production wafers. SiO2, SiON, and high-k dielectrics can be measured. Advanced Hg probe capacitance-voltage systems measure low-k dielectrics and epitaxial silicon layers. NanoSRP spreading resistance systems measure epi transition width, buried layer profiles, and ultrashallow junction profiles. Systems are also available for liquid crystal display and thin-film disk read head applications.
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