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Solid State Measurements

110 Technology Dr.
Pittsburgh, PA 15275
Tel: 412/787-0620
Fax: 412/787-0630

E-mail: sales@ssm-inc.com

Description:
SSM products measure electrical properties of semiconductor devices during fabrication. FastGate electrical metrology systems measure gate oxide thickness, flat band voltage, and leakage current on sub-1-nm oxides in-line on 200- and 300-mm production wafers. SiO2, SiON, and high-k dielectrics can be measured. Advanced Hg probe capacitance-voltage systems measure low-k dielectrics and epitaxial silicon layers. NanoSRP spreading resistance systems measure epi transition width, buried layer profiles, and ultrashallow junction profiles. Systems are also available for liquid crystal display and thin-film disk read head applications.

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