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Solid State Equipment

185 Gibraltar Rd.
Horsham, PA 19044
Tel: 215/328-0700
Fax: 215/328-9410

E-mail: info@ssecusa.com

Description:
Solid State Equipment offers single-wafer wet processing products for wafers up to 300 mm and configured to 180 wafers per hour. Tools perform double-sided cleaning with 0.088-nm particle removal; wet etch processes with better than 1% uniformity; backside and bevel edge chemical cleans to 0.8 mm; and wafer thinning, aqueous, and solvent develop and spin-coat processing with an open or closed cup. The SSEC 3300 has up to eight stations, the 3300 ML is a manual load system, and the 3400 series is for use in flat-panel-display manufacturing. All SSEC systems are S2-0200 and S8 compliant.

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