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Superior Automation

6300-C San Ignacio Ave.
San Jose, CA 95119
Tel: 408/227-4898
Fax: 408/227-4899


Superior Automation manufactures automated wet process equipment and provides factory automation products for the semiconductor industry. The company's wet process systems offer high reliability, low cost of ownership, and precision control. Its GEM Suite factory automation products include data-collection and analysis tools, remote monitoring/control, host/equipment interfaces, lot tracking, metrology feedback, bar-code interface, SPC, APC, and Web-based interface.

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